TZIG 900gr - 10min) _ramp name=n_53 temperature=900 lt; C gt; time=10 lt; min gt; N2 lasttemp.ramp=n_53
# (No 59 DIFFUSIA FOSFORA - TEMPERATURES) temp.ramp=n_43
# (No 66 oxidation 25 nm) _ramp name=n66 temperature=850 lt; C gt; time=40 lt; min gt; N2_ramp name=n66 temperature=850 lt; C gt; time=10 lt; min gt; N2_ramp name=n66 temperature=850 lt; C gt; time=30 lt; min gt; N2_ramp name=n66 temperature=850 lt; C gt; time=65 lt; min gt; N2_ramp name=n66 temperature=850 lt; C gt; time=35 lt; min gt; N2 trate=- 1.428 lt; C/min gt; _ramp name=n66 temperature=800 lt; C gt; time=25 lt; min gt; N2 lasttemp.ramp=n66
# (26.036 IMPLANTATION STOK) Arsenic energy=100 dose=1.25e15 tilt=7 rotation=0Arsenic energy=100 dose=1.25e15 tilt=7 rotation=90Arsenic energy=100 dose=1.25e15 tilt= 7 rotation=180Arsenic energy=100 dose=1.25e15 tilt=7 rotation=270_ramp name=n_26.036 temperature=900 lt; C gt; time=30 lt; min gt; N2 lasttemp.ramp=n_26.036
# etch resistoxide thickness=0.5 type=isotropic
# (32.140 OXIDATION 250 A - TEMPERATURES ONLY !!!) _ramp name=n32.140 temperature=850 lt; C gt; time=20 lt; min gt; N2_ramp name=n32.140 temperature=850 lt; C gt; time=18 lt; min gt; N2_ramp name=n32.140 temperature=850 lt; C gt; time=40 lt; min gt; N2 lasttemp.ramp=n32.140
# (32.121 SiO2 FIRM) _ramp name=n32.121 temperature=850 lt; C gt; time=20 lt; min gt; N2_ramp name=n32.121 temperature=850 lt; C gt; time=10 lt; min gt; N2 trate=7 lt; C/min gt; _ramp name=n32.121 temperature=920 lt; C gt; time=90 lt; min gt; N2_ramp name=n32.121 temperature=920 lt; C gt; time=20 lt; min gt; N2 trate=- 3.5 lt; C/min gt; _ramp name=n32.121 temperature=850 lt; C gt; time=10 lt; min gt; N2 lasttemp.ramp=n32.121
# (32.125 HETTER ONLY TEMPERATURE) _ramp name=n32.125 temperature=1040 lt; C gt; time=5 lt; min gt; trate=6 lt; C/min gt; _ramp name=n32.125 temperature=1 070 lt; C gt; time=13 lt; min gt; _ramp name=n32.125 temperature=1 070 lt; C gt; time=80 lt; min gt; trate=- 3.625 lt; C/min gt; _ramp name=n32.125 temperature=780 lt; C gt; time=5 lt; min gt; lasttemp.ramp=n32.125
# (No 78 OTZIG 850gr - 30min) _ramp name=n78 temperature=850 lt; C gt; time=70 lt; min gt; N2_ramp name=n78 temperature=850 lt; C gt; time=15 lt; min gt; N2 trate=- 3.333 lt; C/min gt; _ramp name=n78 temperature=800 lt; C gt; time=25 lt; min gt; N2 lasttemp.ramp=n78
# (No 80 OPLAVLENIE BFSS - 850gr - 30min) temp.ramp=n78
# (No 81 OTZIG 550gr - 20min) _ramp name=n81 temperature=850 lt; C gt; time=70 lt; min gt; N2temp.ramp=n81tdr=1_new_ccd1d_14.04.14
